@inproceedings{TUW-106427, author = {Wittmann, Robert and H{\"o}ssinger, Andreas and Selberherr, Siegfried}, title = {{S}tatistical {A}nalysis for the {T}hree-{D}imensional {M}onte {C}arlo {S}imulation of {I}on {I}mplantation}, booktitle = {{I}ndustrial {S}imulation {C}onference 2003}, year = {2003}, pages = {159--163}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2003_Wittmann_1.pdf}, isbn = {90-77381-03-1}, note = {talk: {I}ndustrial {S}imulation {C}onference ({I}{S}{C}), {V}alencia; 2003-06-09 -- 2003-06-11} }