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@inproceedings{TUW-106428,
    author = {Hollauer, Christian and Ceric, Hajdin and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {M}odeling of {T}hermal {O}xidation of {S}ilicon by {M}eans of the {F}inite {E}lement {M}ethod},
    booktitle = {{I}ndustrial {S}imulation {C}onference 2003},
    year = {2003},
    pages = {154--158},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2003_Hollauer_1.pdf},
    isbn = {90-77381-03-1},
    note = {talk: {I}ndustrial {S}imulation {C}onference ({I}{S}{C}), {V}alencia; 2003-06-09 -- 2003-06-11}
}