@inproceedings{TUW-106428, author = {Hollauer, Christian and Ceric, Hajdin and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {M}odeling of {T}hermal {O}xidation of {S}ilicon by {M}eans of the {F}inite {E}lement {M}ethod}, booktitle = {{I}ndustrial {S}imulation {C}onference 2003}, year = {2003}, pages = {154--158}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2003_Hollauer_1.pdf}, isbn = {90-77381-03-1}, note = {talk: {I}ndustrial {S}imulation {C}onference ({I}{S}{C}), {V}alencia; 2003-06-09 -- 2003-06-11} }