@inproceedings{TUW-106441, author = {Wessner, Wilfried and Heitzinger, Clemens and H{\"o}ssinger, Andreas and Selberherr, Siegfried}, title = {{E}rror {E}stimated {D}riven {A}nisotropic {M}esh {R}efinement for {T}hree-{D}imensional {D}iffusion {S}imulation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2003}, pages = {109--112}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/CP2003_Wessner_1.pdf}, isbn = {0-7803-7826-1}, doi = {10.1109/SISPAD.2003.1233649}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {C}ambridge, {M}{A}, {U}{S}{A}; 2003-09-03 -- 2003-09-05} }