@inproceedings{TUW-106453, author = {Badrieh, Fuad and Puchner, Helmut and Heitzinger, Clemens and Sheikholeslami, Alireza and Selberherr, Siegfried}, title = {{F}rom {F}eature {S}cale {S}imulation to {B}ackend {S}imulation for a 100nm {C}{M}{O}{S} {P}rocess}, booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})}, year = {2003}, pages = {441--444}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/CP2003_Badrieh_1.pdf}, isbn = {0-7803-7999-3}, note = {poster presentation: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {E}storil; 2003-09-16 -- 2003-09-18} }