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@inproceedings{TUW-106476,
    author = {Sheikholeslami, Alireza and Heitzinger, Clemens and Selberherr, Siegfried and Badrieh, Fuad and Puchner, Helmut},
    title = {{C}apacitances in the {B}ackend of a 100nm {C}{M}{O}{S} {P}rocess and their {P}redictive {S}imulation},
    booktitle = {{B}eitr{\"a}ge der {I}nformationstagung {M}ikroelektronik 2003},
    year = {2003},
    pages = {481--486},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/CP2003_Sheikholeslami_3.pdf},
    isbn = {3-85133-030-7},
    note = {poster presentation: {I}nformationstagung {M}ikroelektronik ({M}{E}), {W}ien; 2003-10-01 -- 2003-10-02}
}