@inproceedings{TUW-106476, author = {Sheikholeslami, Alireza and Heitzinger, Clemens and Selberherr, Siegfried and Badrieh, Fuad and Puchner, Helmut}, title = {{C}apacitances in the {B}ackend of a 100nm {C}{M}{O}{S} {P}rocess and their {P}redictive {S}imulation}, booktitle = {{B}eitr{\"a}ge der {I}nformationstagung {M}ikroelektronik 2003}, year = {2003}, pages = {481--486}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/CP2003_Sheikholeslami_3.pdf}, isbn = {3-85133-030-7}, note = {poster presentation: {I}nformationstagung {M}ikroelektronik ({M}{E}), {W}ien; 2003-10-01 -- 2003-10-02} }