@inproceedings{TUW-106477, author = {Wessner, Wilfried and H{\"o}ssinger, Andreas and Selberherr, Siegfried}, title = {{A}nisotropic {M}esh {R}efinement for {T}hree-{D}imensional {D}iffusion {S}imulation}, booktitle = {{B}eitr{\"a}ge der {I}nformationstagung {M}ikroelektronik 2003}, year = {2003}, pages = {523--528}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/CP2003_Wessner_3.pdf}, isbn = {3-85133-030-7}, note = {poster presentation: {I}nformationstagung {M}ikroelektronik ({M}{E}), {W}ien; 2003-10-01 -- 2003-10-02} }