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@mastersthesis{TUW-106570,
    author = {Heinzl, Rene},
    title = {{A} {T}hree {D}imensional {A}nalytical {I}on {I}mplantation {T}ool {U}sing the {W}afer-{S}tate-{S}erver},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2003}
}