@article{TUW-106768, author = {Hobler, Gerhard and Langer, Erasmus and Selberherr, Siegfried}, title = {{T}wo-{D}imensional {M}odeling of {I}on {I}mplantation with {S}patial {M}oments}, journal = {{S}olid-{S}tate {E}lectronics}, year = {1987}, volume = {30}, number = {4}, pages = {445--455}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1987/JB1987_Hobler_1.pdf}, doi = {10.1016/0038-1101(87)90175-4} }