@article{TUW-106784, author = {Pichler, P. and J{\"u}ngling, Werner and Selberherr, Siegfried and Guerrero, E. and P{\"o}tzl, Hans}, title = {{S}imulation of {C}ritical {I}{C}-{F}abrication {S}teps}, journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices}, year = {1985}, volume = {32}, number = {10}, pages = {1940--1953}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1986/JB1985_Pichler_2.pdf}, doi = {10.1109/T-ED.1985.22226} }