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@article{TUW-106784,
    author = {Pichler, P. and J{\"u}ngling, Werner and Selberherr, Siegfried and Guerrero, E. and P{\"o}tzl, Hans},
    title = {{S}imulation of {C}ritical {I}{C}-{F}abrication {S}teps},
    journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices},
    year = {1985},
    volume = {32},
    number = {10},
    pages = {1940--1953},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1986/JB1985_Pichler_2.pdf},
    doi = {10.1109/T-ED.1985.22226}
}