@article{TUW-106787, author = {J{\"u}ngling, Werner and Pichler, P. and Selberherr, Siegfried and Guerrero, E. and P{\"o}tzl, Hans}, title = {{S}imulation of {C}ritical {I}{C} {F}abrication {P}rocesses {U}sing {A}dvanced {P}hysical and {N}umerical {M}ethods}, journal = {{I}{E}{E}{E} {J}ournal of {S}olid-{S}tate {C}ircuits}, year = {1985}, volume = {20}, number = {1}, pages = {76--87}, url = {http://www.iue.tuwien.ac.at/pdf/JB1985_Juengling_1.pdf}, doi = {10.1109/JSSC.1985.1052279} }