@article{TUW-106791, author = {Selberherr, Siegfried}, title = {{P}rocess and {D}evice {M}odeling for {V}{L}{S}{I}}, journal = {{M}icroelectronics {R}eliability}, year = {1984}, volume = {24}, number = {2}, pages = {225--257}, url = {http://www.iue.tuwien.ac.at/pdf/JB1984_Selberherr_1.pdf}, doi = {10.1016/0026-2714(84)90450-5}, note = {invited} }