@article{TUW-106840, author = {Heitzinger, Clemens and Selberherr, Siegfried}, title = {{O}n the {S}imulation of the {F}ormation and {D}issolution of {S}ilicon {S}elf-{I}nterstitial {C}lusters and the {C}orresponding {I}nverse {M}odeling {P}roblem}, journal = {{M}icroelectronics {J}ournal}, year = {2004}, volume = {35}, number = {2}, pages = {167--171}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/JB2004_Heitzinger_1.pdf}, doi = {10.1016/j.mejo.2003.09.014} }