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@article{TUW-106840,
    author = {Heitzinger, Clemens and Selberherr, Siegfried},
    title = {{O}n the {S}imulation of the {F}ormation and {D}issolution of {S}ilicon {S}elf-{I}nterstitial {C}lusters and the {C}orresponding {I}nverse {M}odeling {P}roblem},
    journal = {{M}icroelectronics {J}ournal},
    year = {2004},
    volume = {35},
    number = {2},
    pages = {167--171},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/JB2004_Heitzinger_1.pdf},
    doi = {10.1016/j.mejo.2003.09.014}
}