@inproceedings{TUW-106858, author = {Otto, Gustav and Hobler, Gerhard}, title = {{C}oupled kinetic {M}onte {C}arlo and molecular dynamics simulations of implant damage accumulation in silicon}, booktitle = {{P}roceedings of {M}{R}{S} {F}all {M}eeting 2003}, year = {2004}, pages = {1--6}, note = {poster presentation: {M}aterials {R}esearch {S}ociety {F}all {M}eeting ({M}{R}{S}), {B}oston/{M}{A}, {U}{S}{A}; 2003-12-01 -- 2003-12-05} }