@inproceedings{TUW-106859, author = {Hobler, Gerhard and Lugstein, Alois and Brezna, Wolfgang and Bertagnolli, Emmerich}, title = {{S}imulation of focused ion beam induced damage formation in crystalline silicon}, booktitle = {{P}roceedings of {M}{R}{S} {F}all {M}eeting 2003}, year = {2004}, numpages = {6}, note = {poster presentation: {M}aterials {R}esearch {S}ociety {F}all {M}eeting ({M}{R}{S}), {B}oston/{M}{A}, {U}{S}{A}; 2003-12-01 -- 2003-12-05} }