@article{TUW-106865, author = {Lugstein, Alois and Brezna, Wolfgang and Hobler, Gerhard and Bertagnolli, Emmerich}, title = {{M}ethod to characterize the three-dimensional distribution of focused ion beam induced damage in silicon after 50 ke{V} {G}a+ irradiation}, journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {A}}, year = {2003}, volume = {21}, number = {5}, pages = {1644--1648} }