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@article{TUW-106865,
    author = {Lugstein, Alois and Brezna, Wolfgang and Hobler, Gerhard and Bertagnolli, Emmerich},
    title = {{M}ethod to characterize the three-dimensional distribution of focused ion beam induced damage in silicon after 50 ke{V} {G}a+ irradiation},
    journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {A}},
    year = {2003},
    volume = {21},
    number = {5},
    pages = {1644--1648}
}