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@article{TUW-106873,
    author = {Hobler, Gerhard and Otto, Gustav},
    title = {{S}tatus and open problems in modeling of as-implanted damage in silicon},
    journal = {{M}aterials {S}cience in {S}emiconductor {P}rocessing},
    year = {2003},
    volume = {6},
    pages = {1--14}
}