@article{TUW-107290, author = {Palankovski, Vassil and Selberherr, Siegfried}, title = {{T}he {S}tate-of-the-{A}rt in {S}imulation for {O}ptimization of {S}i{G}e-{H}{B}{T}s}, journal = {{A}pplied {S}urface {S}cience}, year = {2004}, volume = {224}, number = {1-4}, pages = {312--319}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/JB2004_Palankovski_1.pdf}, doi = {10.1016/j.apsusc.2003.09.036} }