@article{TUW-107297, author = {Heitzinger, Clemens and H{\"o}ssinger, Andreas and Selberherr, Siegfried}, title = {{O}n {S}moothing {T}hree-{D}imensional {M}onte {C}arlo {I}on {I}mplantation {S}imulation {R}esults}, journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems}, year = {2003}, volume = {22}, number = {7}, pages = {879--883}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/JB2003_Heitzinger_2.pdf}, doi = {10.1109/TCAD.2003.814259} }