@book{TUW-107489, author = {Pichler, Peter}, title = {{I}ntrinsic {P}oint {D}efects, {I}mpurities, and {T}heir {D}iffusion in {S}ilicon}, publisher = {{S}pringer-{V}erlag, {W}ien - {N}ew {Y}ork}, year = {2004}, series = {{C}omputational {M}icroelectronics}, editor = {Selberherr, Siegfried}, numpages = {554}, url = {http://www.iue.tuwien.ac.at/books/intrinsic_pointdefects/}, isbn = {978-3-7091-7204-9}, doi = {10.1007/978-3-7091-0597-9} }