@article{TUW-107523, author = {Heitzinger, Clemens and H{\"o}ssinger, Andreas and Selberherr, Siegfried}, title = {{A}n {A}lgorithm for {S}moothing {T}hree-{D}imensional {M}onte {C}arlo {I}on {I}mplantation {S}imulation {R}esults}, journal = {{M}athematics and {C}omputers in {S}imulation}, year = {2004}, volume = {66}, number = {2-3}, pages = {219--230}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2004/JB2004_Heitzinger_3.pdf}, doi = {10.1016/j.matcom.2003.11.010} }