@article{TUW-107537, author = {Heitzinger, Clemens and Sheikholeslami, Alireza and Badrieh, Fuad and Puchner, Helmut and Selberherr, Siegfried}, title = {{F}eature-{S}cale {P}rocess {S}imulation and {A}ccurate {C}apacitance {E}xtraction for the {B}ackend of a 100-nm {A}luminum/{T}{E}{O}{S} {P}rocess}, journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices}, year = {2004}, volume = {51}, number = {7}, pages = {1129--1134}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2005/JB2004_Heitzinger_4.pdf}, doi = {10.1109/TED.2004.829868} }