@inproceedings{TUW-107750, author = {Hobler, Gerhard and Selberherr, Siegfried}, title = {{E}fficient {T}wo-{D}imensional {M}onte-{C}arlo {S}imulation of {I}on {I}mplantation}, booktitle = {{P}roceedings {C}onference on the {N}umerical {A}nalysis of {S}emiconductor {D}evices and {I}ntegrated {C}ircuits}, year = {1987}, pages = {225--230}, url = {http://www.iue.tuwien.ac.at/pdf/CP1987_Hobler_1.pdf}, note = {talk: {I}nternational {C}onference on the {N}umerical {A}nalysis of {S}emiconductor {D}evices ({N}{A}{S}{E}{C}{O}{D}{E}), {D}ublin; 1987-06-17 -- 1987-06-19} }