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@article{TUW-107752,
    author = {Selberherr, Siegfried},
    title = {{P}rocess {M}odeling},
    journal = {{M}icroelectronic {E}ngineering},
    year = {1989},
    volume = {9},
    number = {1-4},
    pages = {605--610},
    url = {http://www.iue.tuwien.ac.at/pdf/JB1989_Selberherr_2.pdf},
    doi = {10.1016/0167-9317(89)90129-9}
}