@article{TUW-107752, author = {Selberherr, Siegfried}, title = {{P}rocess {M}odeling}, journal = {{M}icroelectronic {E}ngineering}, year = {1989}, volume = {9}, number = {1-4}, pages = {605--610}, url = {http://www.iue.tuwien.ac.at/pdf/JB1989_Selberherr_2.pdf}, doi = {10.1016/0167-9317(89)90129-9} }