@article{TUW-107764, author = {Holzer, Stefan and Minixhofer, R. and Heitzinger, Clemens and Fellner, Johannes and Grasser, Tibor and Selberherr, Siegfried}, title = {{E}xtraction of {M}aterial {P}arameters {B}ased on {I}nverse {M}odeling of {T}hree-{D}imensional {I}nterconnect {F}using {S}tructures}, journal = {{M}icroelectronics {J}ournal}, year = {2004}, volume = {35}, number = {10}, pages = {805--810}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2005/JB2004_Holzer_1.pdf}, doi = {10.1016/j.mejo.2004.06.011} }