@inproceedings{TUW-107933, author = {Hobler, Gerhard and Langer, Erasmus and Selberherr, Siegfried}, title = {{T}wo-{D}imensional {M}odeling of {I}on-{I}mplantation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {D}evices and {P}rocesses}, year = {1986}, pages = {256--270}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1986/CP1986_Hobler_2.pdf}, isbn = {0-906674-59-x}, note = {talk: {I}nternational {C}onference on the {S}imulation of {S}emiconductor {D}evices and {P}rocesses ({S}{I}{S}{D}{E}{P}), {S}wansea; 1986-07-21 -- 1986-07-23} }