@inproceedings{TUW-107946, author = {Hobler, Gerhard and Guerrero, E. and Selberherr, Siegfried}, title = {{T}wo-{D}imensional {M}odeling of {I}on {I}mplantation {I}nduced {P}oint {D}efects}, booktitle = {{P}roceedings of the {I}nternational {W}orkshop on {N}umerical {M}odeling of {P}rocesses and {D}evices for {I}ntegrated {C}ircuits}, year = {1986}, pages = {10--11}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1986/CP1986_Hobler_1.pdf}, note = {talk: {I}nternational {W}orkshop on {N}umerical {M}odeling of {P}rocesses and {D}evices for {I}ntegrated {C}ircuits ({N}{U}{P}{A}{D}), {S}anta {C}lara; 1986-11-13 -- 1986-11-14} }