@inproceedings{TUW-107962, author = {Hobler, Gerhard and Selberherr, Siegfried}, title = {{V}erification of {I}on {I}mplantation {M}odels by {M}onte-{C}arlo {S}imulations}, booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})}, year = {1987}, pages = {445--448}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1987/CP1987_Hobler_1.pdf}, note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {B}ologna; 1987-09-14 -- 1987-09-17} }