@article{TUW-108210, author = {Otto, Gustav and Kovac, Dalibor and Hobler, Gerhard}, title = {{C}oupled {B}{C}/k{L}{M}{C} simulations of the temperature dependence of implant damage formation in silicon}, journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}}, year = {2005}, volume = {228}, pages = {256--259} }