@article{TUW-108212, author = {Hobler, Gerhard and Otto, Gustav and Kovac, Dalibor and Palmetshofer, L. and Mayerhofer, Karl Emanuel and Piplits, Kurt}, title = {{M}ultiscale approach for the analysis of channeling profile measurements of ion implantation damage}, journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}}, year = {2005}, volume = {228}, pages = {360--363} }