@inproceedings{TUW-108985, author = {Hollauer, Christian and Ceric, Hajdin and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {S}imulation of {S}tress {D}ependent {T}hermal {O}xidation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2005}, pages = {183--186}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/CP2005_Hollauer_1.pdf}, isbn = {4-9902762-0-5}, doi = {10.1109/SISPAD.2005.201503}, note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {T}okyo, {J}apan; 2005-09-01 -- 2005-09-03} }