@inproceedings{TUW-109692, author = {Hollauer, Christian and Ceric, Hajdin and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {S}imulation of {T}hermal {O}xidation and the {I}nfluence of {S}tress}, booktitle = {208\textsuperscript{th} {E}{C}{S} {M}eeting}, year = {2005}, numpages = {1}, eid = {734}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/CP2005_Hollauer_02.pdf}, issn = {1091-8213}, note = {talk: {M}eeting of the {E}lectrochemical {S}ociety, {P}hysics and {C}hemistry of {S}i{O}2 and the {S}i-{S}i{O}2 {I}nterface, {L}os {A}ngeles; 2005-10-16 -- 2005-10-21} }