@incollection{TUW-109723, author = {Hollauer, Christian and Ceric, Hajdin and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {S}imulation of {T}hermal {O}xidation and the {I}nfluence of {S}tress}, booktitle = {{Physics and Chemistry of SiO{$_{2}$} and the Si-SiO{$_{2}$} Interface-5, Vol. 1 No. 1}}, year = {2005}, pages = {103--113}, organization = {{H}.{Z}. {M}assoud, {J}.{H}. {S}tathis, {T}. {H}attori, {D}. {M}isra, {I}. {B}aumvol}, publisher = {{E}{C}{S} {T}ransactions}, address = {{P}ennington}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/JB2005_Hollauer_1.pdf}, isbn = {1-56677-430-6}, doi = {10.1149/ma2005-02/19/734} }