@phdthesis{TUW-109783, author = {Otto, Gustav}, title = {{M}ulti-method {S}imulations and {T}ransmission {E}lectron {M}icroscope {I}nvestigations of {I}on {I}mplantation {D}amage in {S}ilicon}, school = {{I}nstitut f{\"u}r {F}estk{\"o}rperelektronik}, year = {2005} }