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@phdthesis{TUW-109783,
    author = {Otto, Gustav},
    title = {{M}ulti-method {S}imulations and {T}ransmission {E}lectron {M}icroscope {I}nvestigations of {I}on {I}mplantation {D}amage in {S}ilicon},
    school = {{I}nstitut f{\"u}r {F}estk{\"o}rperelektronik},
    year = {2005}
}