@inproceedings{TUW-109805, author = {Zahel, Thomas and Otto, Gustav and Hobler, Gerhard}, title = {{A}tomistic {S}imulation of {H}ydrogen {I}mplantation for {S}{O}{I} {W}afer {P}roduction}, booktitle = {{E}{U}{R}{O}{S}{O}{I} 2005, {B}ook of {A}bstracts}, year = {2005}, pages = {35--36}, note = {talk: {W}orkshop of the {T}hematic {N}etwork on {S}ilicon on {I}nsulator {T}echnology, {D}evices, and {C}ircuits ({E}{U}{R}{O}{S}{O}{I}), {G}ranadea, {S}panien; 2005-01-19 -- 2005-01-21} }