@inproceedings{TUW-109807, author = {Zahel, Thomas and Otto, Gustav and Hobler, Gerhard}, title = {{A}tomistic simulation of the isotope effect on defect formation in {H}/{D}-implanted {S}i}, booktitle = {{S}ilicon-on-{I}nsulator {T}echnology and {D}evices {X}{I}}, year = {2005}, pages = {179--184}, note = {talk: {M}eeting of the {E}lectrochemical {S}ociety, {S}ilicon-on-{I}nsulator {T}echnology and {D}evices {X}{I}{I}, {Q}uebec {C}ity, {C}anada; 2005-05-15 -- 2005-05-20} }