[Back]

@inproceedings{TUW-109856,
    author = {Kim, Heung Bae and Hobler, Gerhard and Lugstein, Alois and Bertagnolli, Emmerich},
    title = {''{A}{M}{A}{D}{E}{U}{S}'' {S}oftware for {I}on {B}eam {N}ano {P}atterning and {C}haracteristics of {N}ano {F}abrication},
    booktitle = {{P}roc. 2005 {A}utumn {C}onference of the {K}orean {S}ociety of {P}recision {E}ngineering},
    year = {2005},
    pages = {322--325},
    note = {talk: {A}utumn {C}onference of the {K}orean {S}ociety of {P}recision {E}ngineering, {G}ang{J}u, {S}outh {K}orea; 2005-10-20 -- 2005-10-21}
}