@inproceedings{TUW-109857, author = {Kim, Heung Bae and Hobler, Gerhard}, title = {{A}nalysis of {I}on {B}eam-{S}olid {I}nteractions for {N}ano {F}abrication}, booktitle = {{P}roc. 2005 {A}utumn {C}onference of the {K}orean {S}ociety of {P}recision {E}ngineering}, year = {2005}, pages = {581--584}, note = {talk: {A}utumn {C}onference of the {K}orean {S}ociety of {P}recision {E}ngineering, {G}ang{J}u, {S}outh {K}orea; 2005-10-20 -- 2005-10-21} }