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@inproceedings{TUW-109857,
    author = {Kim, Heung Bae and Hobler, Gerhard},
    title = {{A}nalysis of {I}on {B}eam-{S}olid {I}nteractions for {N}ano {F}abrication},
    booktitle = {{P}roc. 2005 {A}utumn {C}onference of the {K}orean {S}ociety of {P}recision {E}ngineering},
    year = {2005},
    pages = {581--584},
    note = {talk: {A}utumn {C}onference of the {K}orean {S}ociety of {P}recision {E}ngineering, {G}ang{J}u, {S}outh {K}orea; 2005-10-20 -- 2005-10-21}
}