@inproceedings{TUW-110060, author = {Strasser, Ernst and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {S}imulation of {S}tep {C}overage for {C}ontact {H}ole {M}etallization}, booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})}, year = {1994}, pages = {339--342}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1994/CP1994_Strasser_1.pdf}, isbn = {2-86332-157-9}, note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {E}dinburgh; 1994-09-11 -- 1994-09-15} }