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@inproceedings{TUW-110060,
    author = {Strasser, Ernst and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {S}tep {C}overage for {C}ontact {H}ole {M}etallization},
    booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})},
    year = {1994},
    pages = {339--342},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1994/CP1994_Strasser_1.pdf},
    isbn = {2-86332-157-9},
    note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {E}dinburgh; 1994-09-11 -- 1994-09-15}
}