@inproceedings{TUW-110062, author = {Langer, Erasmus and Selberherr, Siegfried}, title = {{T}he {S}tatus of {P}rocess and {D}evice {S}imulation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L})}, year = {1994}, pages = {256--260}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1994/CP1994_Langer_1.pdf}, note = {invited; talk: {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L}), {I}stanbul; 1994-09-05 -- 1994-09-07} }