@inproceedings{TUW-110134, author = {Suvorov, V and H{\"o}ssinger, Andreas and Djuric, Zoran}, title = {{A} {N}ovel {A}pproach to {T}hree-{D}imensional {S}emiconductor {P}rocess {S}imulation: {A}pplication to {T}hermal {O}xidation}, booktitle = {{B}ook of {A}bstracts of the {I}nternational {W}orkshop on {C}omputational {E}lectronics ({I}{W}{C}{E})}, year = {2006}, pages = {3--4}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/CP2006_Hoessinger_1.pdf}, isbn = {3-901578-16-1}, note = {talk: {I}nternational {W}orkshop on {C}omputational {E}lectronics ({I}{W}{C}{E}), {V}ienna, {A}ustria; 2006-05-25 -- 2006-05-27} }