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@inproceedings{TUW-110205,
    author = {Holzer, Stefan and Sheikholeslami, Alireza and Karner, Markus and Grasser, Tibor},
    title = {{C}omparison of {D}eposition {M}odels for {T}{E}{O}{S} {C}{V}{D} {P}rocess},
    booktitle = {{W}{O}{D}{I}{M} 2006 14\textsuperscript{th} {W}orkshop on {D}ielectrics in {M}icroelectronics {W}orkshop {P}rogramme and {A}bstracts},
    year = {2006},
    pages = {158--159},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2006/CP2006_Holzer_2.pdf},
    note = {talk: {W}orkshop on {D}ielectrics in {M}icroelectronics ({W}{O}{D}{I}{M}), {C}atania; 2006-06-26 -- 2006-06-28}
}