@phdthesis{TUW-110405, author = {Minixhofer, R.}, title = {{I}ntegration {T}echnology {S}imulation into the {S}emiconductor {M}anufacturing {E}nvironment}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {2006}, url = {http://www.iue.tuwien.ac.at/phd/minixhofer}, doi = {10.34726/hss.2006.5439} }