@article{TUW-110542, author = {Wessner, Wilfried and Cervenka, Johann and Heitzinger, Clemens and H{\"o}ssinger, Andreas and Selberherr, Siegfried}, title = {{A}nisotropic {M}esh {R}efinement for the {S}imulation of {T}hree-{D}imensional {S}emiconductor {M}anufacturing {P}rocesses}, journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems}, year = {2006}, volume = {25}, number = {10}, pages = {2129--2139}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2007/JB2006_Wessner_1.pdf}, doi = {10.1109/TCAD.2005.862750} }