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@article{TUW-110630,
    author = {Otto, Gustav and Hobler, Gerhard and Palmetshofer, L. and Mayerhofer, Karl Emanuel and Piplits, Kurt and Hutter, Herbert},
    title = {{D}ose-rate dependence of damage formation in {S}i by {N} implantation as determined from channeling profile measurements},
    journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}},
    year = {2006},
    volume = {242},
    pages = {667--669}
}