@article{TUW-110630, author = {Otto, Gustav and Hobler, Gerhard and Palmetshofer, L. and Mayerhofer, Karl Emanuel and Piplits, Kurt and Hutter, Herbert}, title = {{D}ose-rate dependence of damage formation in {S}i by {N} implantation as determined from channeling profile measurements}, journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}}, year = {2006}, volume = {242}, pages = {667--669} }