[Back]

@incollection{TUW-110663,
    author = {Wittmann, Robert and H{\"o}ssinger, Andreas and Selberherr, Siegfried},
    title = {{C}alibration for the {M}onte {C}arlo {S}imulation of {I}on {I}mplantation in {R}elaxed {S}i{G}e},
    booktitle = {{S}i{G}e: {M}aterials, {P}rocessing, and {D}evices},
    year = {2004},
    pages = {181--192},
    organization = {{T}he {E}lectrochemical {S}ociety},
    publisher = {{E}{C}{S} {T}ransactions},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2005/CP2004_Wittmann_2.pdf},
    isbn = {1-56677-420-9}
}