@incollection{TUW-110663, author = {Wittmann, Robert and H{\"o}ssinger, Andreas and Selberherr, Siegfried}, title = {{C}alibration for the {M}onte {C}arlo {S}imulation of {I}on {I}mplantation in {R}elaxed {S}i{G}e}, booktitle = {{S}i{G}e: {M}aterials, {P}rocessing, and {D}evices}, year = {2004}, pages = {181--192}, organization = {{T}he {E}lectrochemical {S}ociety}, publisher = {{E}{C}{S} {T}ransactions}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2005/CP2004_Wittmann_2.pdf}, isbn = {1-56677-420-9} }