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@phdthesis{TUW-110749,
    author = {Sheikholeslami, Alireza},
    title = {{T}opography {S}imulation of {D}eposition and {E}tching {P}rocesses},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2006},
    url = {http://www.iue.tuwien.ac.at/phd/sheikholeslami/}
}