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@article{TUW-111241,
    author = {Sheikholeslami, Alireza and Parhami, Farnaz and Puchner, H and Selberherr, Siegfried},
    title = {{P}lanarization of {S}ilicon {D}ioxide and {S}ilicon {N}itride {P}assivation {L}ayers},
    journal = {{J}ournal of {P}hysics: {C}onference {S}eries},
    year = {2007},
    volume = {61},
    pages = {1051--1055},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2007/JB2007_Sheikholeslami_1.pdf},
    doi = {10.1088/1742-6596/61/1/208}
}