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@phdthesis{TUW-111269,
    author = {Wittmann, Robert},
    title = {{M}iniaturization {P}roblems in {C}{M}{O}{S} {T}echnology: {I}nvestigation of {D}oping {P}rofiles and {R}eliability},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2007},
    url = {http://www.iue.tuwien.ac.at/phd/wittmann/},
    doi = {10.34726/hss.2007.7645}
}