@book{TUW-111512, editor = {Grasser, Tibor and Selberherr, Siegfried}, title = {{S}imulation of {S}emiconductor {P}rocesses and {D}evices 2007}, publisher = {{S}pringer-{V}erlag, {W}ien - {N}ew {Y}ork}, year = {2007}, address = {{W}ien}, numpages = {460}, url = {http://www.iue.tuwien.ac.at/books/SISPAD_2007/}, isbn = {978-3-211-72860-4}, doi = {10.1007/978-3-211-72861-1} }