@inproceedings{TUW-111705, author = {Cervenka, Johann and Ceric, Hajdin and Ertl, Otmar and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {S}acri{\&}{\#}64257;cial {E}tching}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2007}, editor = {Grasser, Tibor and Selberherr, Siegfried}, pages = {433--436}, publisher = {{S}pringer-{V}erlag {W}ien {N}ew {Y}ork}, address = {12}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2008/CP2007_Cervenka_1.pdf}, isbn = {978-3-211-72860-4}, doi = {10.1007/978-3-211-72861-1{\_}105}, note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {V}ienna, {A}ustria; 2007-09-25 -- 2007-09-27} }